Role of Ultra Thin SiOx Layer on Epitaxial YSZ/SiOx/Si Thin...

Integrated Ferroelectrics 2002 / 01 Vol. 45; Iss. 1

Role of Ultra Thin SiOx Layer on Epitaxial YSZ/SiOx/Si Thin Film as Multi Functional Buffer Layer by Nano-Probe and In-Situ TEM Investigation

Kiguchi, Takanori, Wakiya, Naoki, Shinozaki, Kazuo, Mizutani, Nobuyasu
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Volume:
45
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/713718205
Date:
January, 2002
File:
PDF, 332 KB
english, 2002
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