Digital computer simulation of rf sputtering interferometer

Journal of Applied Physics 1977 Vol. 48; Iss. 3

Digital computer simulation of rf sputtering interferometer

Wang, R. H., Dick, G. J., Mercereau, J. E.
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Volume:
48
Year:
1977
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.323726
File:
PDF, 639 KB
english, 1977
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