Epitaxial growth of silicon with Hg-Xe lamp light irradiation
Ishitani, Akihiko, Kanamori, Masaru, Tsuya, HidekiVolume:
57
Year:
1985
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.335238
File:
PDF, 562 KB
english, 1985