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Unmonochromatized synchrotron radiation promoted silicon oxynitridation at room temperature
Glachant, A., Soukiassian, P., Kim, S. T., Kapoor, S., Papageorgopoulos, Aris, Baros, Y.Volume:
70
Year:
1991
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.349412
File:
PDF, 1.23 MB
english, 1991