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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Charge-drift elimination in resonant electrostatic MEMS
Bahl, Gaurav, Salvia, James, Bargatin, Igor, Yoneoka, Shingo, Melamud, Renata, Kim, Bongsang, Chandorkar, Saurabh, Hopcroft, Matthew A., Bahl, Rajendar, Howe, Roger T., Kenny, Thomas W.Year:
2010
Language:
english
DOI:
10.1109/memsys.2010.5442555
File:
PDF, 410 KB
english, 2010