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Ion chemistries in hexamethyldisiloxane
Jiao, C. Q., DeJoseph, C. A., Garscadden, A.Volume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1953669
File:
PDF, 458 KB
english, 2005