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[IEEE 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Zhuhai, China (2006.01.18-2006.01.21)] 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - An Improved 3D Simulator for MEMS Processes
Tan, Yiyong, Li, Zhihong, Wang, Lei, Lu, Guizhang, Zhao, XinYear:
2006
Language:
english
DOI:
10.1109/nems.2006.334577
File:
PDF, 4.55 MB
english, 2006