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[IEEE 2007 IEEE Sensors - Atlanta, GA, USA (2007.10.28-2007.10.31)] 2007 IEEE Sensors - Investigation of Top/Bottom Electrode and Diffusion Barrier Layer for PZT Thick Film MEMS Sensors
Pedersen, T., Hindrichsen, C. C., Thomsen, E. V., Hansen, K., Lou-Moller, R.Year:
2007
Language:
english
DOI:
10.1109/icsens.2007.4388510
File:
PDF, 1.05 MB
english, 2007