Contact metallurgy for shallow junction Si devices

Journal of Applied Physics 1976 / 12 Vol. 47; Iss. 12

Contact metallurgy for shallow junction Si devices

Kircher, C. J.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
47
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.322568
Date:
December, 1976
File:
PDF, 729 KB
english, 1976
Conversion to is in progress
Conversion to is failed