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Superior material properties of AlN on vicinal 4H-SiC
Kakanakova-Georgieva, A., Persson, P. O. Å, Kasic, A., Hultman, L., Janzén, E.Volume:
100
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2219380
File:
PDF, 538 KB
english, 2006