Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2010 Vol. 28; Iss. 6
Shape control and density multiplication of cylinder-forming ternary block copolymer-homopolymer blend thin films on chemical patterns
Kang, Huiman, Detcheverry, Francois, Stuen, Karl O., Craig, Gordon S. W., de Pablo, Juan J., Gopalan, Padma, Nealey, Paul F.Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3518910
File:
PDF, 1.02 MB
english, 2010