Refractory rf ovens and sputter probes for electron...

Review of Scientific Instruments 2008 Vol. 79; Iss. 2

Refractory rf ovens and sputter probes for electron cyclotron resonance ion source

Cavenago, M., Galatá, A., Kulevoy, T., Petrenko, S., Sattin, M., Facco, A.
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Volume:
79
Year:
2008
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2804893
File:
PDF, 752 KB
english, 2008
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