[IEEE 2008 International Conference on Information and Automation (ICIA) - Changsha, China (2008.06.20-2008.06.23)] 2008 International Conference on Information and Automation - Simulation and pattern distortion analysis of UV-LIGA based on the partial coherent light theory
Mujun Li,, Lianguan Shen,, Jinjin Zheng,, Wei Zhao,, Liting Liu,Year:
2008
Language:
english
DOI:
10.1109/icinfa.2008.4608242
File:
PDF, 1.14 MB
english, 2008