Scanning spreading resistance microscopy of two-dimensional...

Scanning spreading resistance microscopy of two-dimensional diffusion of boron implanted in free-standing silicon nanostructures

Kluth, S. M., Álvarez, D., Trellenkamp, St., Moers, J., Mantl, S., Kretz, J., Vandervorst, W.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1839898
File:
PDF, 478 KB
english, 2005
Conversion to is in progress
Conversion to is failed