Compensation for transient chamber wall condition using real-time plasma density feedback control in an inductively coupled plasma etcher
Klimecky, Pete I., Grizzle, J. W., Terry, Fred L.Volume:
21
Year:
2003
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1569921
File:
PDF, 674 KB
english, 2003