In situ study of erosion and deposition of amorphous...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2012 Vol. 30; Iss. 4

In situ study of erosion and deposition of amorphous hydrogenated carbon films by exposure to a hydrogen atom beam

Markelj, Sabina, Pelicon, Primož, Čadež, Iztok, Schwarz-Selinger, Thomas, Jacob, Wolfgang
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4723637
File:
PDF, 1.27 MB
english, 2012
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