Influence of the power on the particles generated in a low pressure radio frequency nitrogen-rich methane discharge
Massereau-Guilbaud, Véronique, Pereira, Jérémy, Géraud-Grenier, Isabelle, Plain, AndréVolume:
105
Year:
2009
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3072664
File:
PDF, 1.57 MB
english, 2009