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Determination of Si self-interstitial diffusivities from the oxidation-enhanced diffusion in B doping-superlattices: The influence of the marker layers
Gossmann, H.-J., Gilmer, G. H., Rafferty, C. S., Unterwald, F. C., Boone, T., Poate, J. M., Luftman, H. S., Frank, W.Volume:
77
Year:
1995
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.358828
File:
PDF, 770 KB
english, 1995