Low-power deposition of fluorinated microcrystalline...

Journal of Applied Physics 1989 Vol. 65; Iss. 10

Low-power deposition of fluorinated microcrystalline silicon hydrogen alloy films

Ray, Swati, De, S. C., Ganguly, Gautam, Barua, A. K., Mascarenhas, A. J., Al-Jassim, M. M., Deb, S. K.
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Volume:
65
Year:
1989
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.343432
File:
PDF, 533 KB
english, 1989
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