Temperature measurements of polyimide during KrF excimer laser ablation
Brunco, D. P., Thompson, Michael O., Otis, C. E., Goodwin, P. M.Volume:
72
Year:
1992
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.352198
File:
PDF, 1.19 MB
english, 1992