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Investigation of the (100)Si/amorphous insulator interface structure by a half-period image of a high-resolution electron microscope
Ohdomari, Iwao, Kai, Kazuhiko, Ueno, Tomo, Suzuki, KazumasaVolume:
65
Year:
1989
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.342700
File:
PDF, 701 KB
english, 1989