Suppression of notching by lowering the bias frequency in electron cyclotron resonance plasma with a divergent magnetic field
Morioka, H.Volume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581192
Date:
May, 1998
File:
PDF, 1.51 MB
english, 1998