Surface stress induced deflections of cantilever plates...

Surface stress induced deflections of cantilever plates with applications to the atomic force microscope: V-shaped plates

Sader, John Elie
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Volume:
91
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1470240
File:
PDF, 375 KB
english, 2002
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