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Hybrid evaporation: Glow discharge source for plasma immersion ion implantation
Li, L. H., Poon, R. W. Y., Kwok, S. C. H., Chu, P. K., Wu, Y. Q., Zhang, Y. H.Volume:
74
Year:
2003
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1606535
File:
PDF, 418 KB
english, 2003