A plasma-polymerized protective film for transmission electron microscopy specimen preparation by focused ion beam etching
Kato, N. I.Volume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581245
Date:
May, 1998
File:
PDF, 779 KB
english, 1998