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[Japan Soc. Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (11-13 July 2000)] Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387) - A surface-bulk micromachined electromagnetic gyroscope operating at atmospheric pressure
Seong-Hyok Kim,, Yong-Kweon Kim,, Jin-Woo Song,, Jang-Gyu Lee,Year:
2000
Language:
english
DOI:
10.1109/imnc.2000.872668
File:
PDF, 171 KB
english, 2000