Characterization of GaAs[sub 1−x]N[sub x] epitaxial layers...

Characterization of GaAs[sub 1−x]N[sub x] epitaxial layers by ion beam analysis

Wei, P., Chicoine, M., Gujrathi, S., Schiettekatte, F., Beaudry, J.-N., Masut, R. A., Desjardins, P.
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Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1648671
File:
PDF, 337 KB
english, 2004
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