Deactivation kinetics of supersaturated boron:silicon...

Deactivation kinetics of supersaturated boron:silicon alloys

Luo, Weiwei, Yang, Shenzhi, Clancy, Paulette, Thompson, Michael O.
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Volume:
90
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1385360
File:
PDF, 356 KB
english, 2001
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