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Theoretical study of thermally stable SiO2/AlN/SiO2 Lamb wave resonators at high temperatures
Zou, Jie, Lin, Chih-Ming, Chen, Yung-Yu, Pisano, Albert P.Volume:
115
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4867613
Date:
March, 2014
File:
PDF, 2.66 MB
english, 2014