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Transparent conducting impurity-doped ZnO thin films prepared using oxide targets sintered by millimeter-wave heating
Minami, Tadatsugu, Okada, Kenji, Miyata, Toshihiro, Nomoto, Juni-chi, Hara, Youhei, Abe, HiroshiVolume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3119674
File:
PDF, 674 KB
english, 2009