Achievement of extreme high vacuum in the order of 10−10 Pa without baking of test chamber
Kato, S.Том:
8
Мова:
english
Журнал:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.576639
Date:
May, 1990
Файл:
PDF, 798 KB
english, 1990