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Near-equilibrium growth of thick, high quality beta-SiC by...

Near-equilibrium growth of thick, high quality beta-SiC by sublimation

Shields, Virgil B., Fekade, Konjit, Spencer, Michael G.
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Volume:
62
Year:
1993
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.109544
File:
PDF, 557 KB
english, 1993
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