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Influence of interface relaxation on passivation kinetics in H[sub 2] of coordination P[sub b] defects at the (111)Si/SiO[sub 2] interface revealed by electron spin resonance
Stesmans, A.Volume:
92
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1482427
File:
PDF, 439 KB
english, 2002