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Spatially resolved atomic hydrogen concentrations and molecular hydrogen temperature profiles in the chemical-vapor deposition of diamond
Connell, L. L., Fleming, J. W., Chu, H.-N., Vestyck, D. J., Jensen, E., Butler, J. E.Volume:
78
Year:
1995
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.359939
File:
PDF, 2.00 MB
english, 1995