![](/img/cover-not-exists.png)
Microprocessor controlled ultrahigh vacuum evaporations of critical thin films, multilayer structures, and coevaporated materials
Fischer, H.Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575196
Date:
May, 1988
File:
PDF, 673 KB
english, 1988