Pulse modulated electron cyclotron resonance plasma for chemical vapor deposition of diamond films
Hatta, A., Kadota, K., Mori, Y., Ito, T., Sasaki, T., Hiraki, A., Okada, S.Volume:
66
Year:
1995
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.113865
File:
PDF, 344 KB
english, 1995