Low temperature deposition of hydrogenated nanocrystalline...

Low temperature deposition of hydrogenated nanocrystalline SiC films by helicon wave plasma enhanced chemical vapor deposition

Yu, Wei, Lu, Wanbing, Teng, Xiaoyun, Ding, Wenge, Han, Li, Fu, Guangsheng
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Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3478675
File:
PDF, 885 KB
english, 2010
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