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Optical characteristics and color of TiN/SiN[sub 1.3] nanocomposite coatings
Jedrzejowski, P., Baloukas, B., Klemberg-Sapieha, J. E., Martinu, L.Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1723252
File:
PDF, 789 KB
english, 2004