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Spectroscopic study of plasma-enhanced organometallic chemical vapor deposition for superconducting thin film formation
Ebihara, Kenji, Kanazawa, Seiji, Ikegami, Tomoaki, Shiga, MasanobuVolume:
68
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.346710
File:
PDF, 820 KB
english, 1990