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Stability of nanocrystalline silicon bottom-gate thin film transistors with silicon nitride gate dielectric
Esmaeili-Rad, Mohammad R., Li, Flora, Sazonov, Andrei, Nathan, ArokiaVolume:
102
Year:
2007
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2784008
File:
PDF, 642 KB
english, 2007