High-fluence implantations of silicon: Layer thickness and...

Journal of Applied Physics 1979 Vol. 50; Iss. 5

High-fluence implantations of silicon: Layer thickness and refractive indices

Hubler, G. K., Waddell, C. N., Spitzer, W. G., Fredrickson, J. E., Prussin, S., Wilson, R. G.
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Volume:
50
Year:
1979
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.326370
File:
PDF, 914 KB
english, 1979
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