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Surface morphology and structural changes in insulators induced by high-current 60 keV Cu[sup −] implantation
Lee, C. G., Takeda, Y., Kishimoto, N., Umeda, N.Volume:
90
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1388599
File:
PDF, 672 KB
english, 2001