Gate stack dielectric degradation of rare-earth oxides...

Gate stack dielectric degradation of rare-earth oxides grown on high mobility Ge substrates

Shahinur Rahman, Md., Evangelou, E. K., Konofaos, N., Dimoulas, A.
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Volume:
112
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4763478
File:
PDF, 2.06 MB
english, 2012
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