Development of dry-processed silicon nanodot planar cold...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2010 Vol. 28; Iss. 2

Development of dry-processed silicon nanodot planar cold cathode and its electron emission properties

Hirano, Yoshiyuki, Nanba, Masakazu, Egami, Norifumi, Yamazaki, Susumu, Koshida, Nobuyoshi
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Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3275746
File:
PDF, 723 KB
english, 2010
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