[IEEE 2007 IEEE Pulsed Power Plasma Science Conference - Albuquerque, NM, USA (2007.06.17-2007.04.22)] 2007 IEEE Pulsed Power Plasma Science Conference - Thin Film Deposition using Atmospheric Pressure Microplasmas
Staack, D., Farouk, B., Gutsol, A., Fridman, A.Year:
2007
Language:
english
DOI:
10.1109/ppps.2007.4346139
File:
PDF, 57 KB
english, 2007