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Laser purification of silane: impurity reduction to the sub-part-per-million level
Hartford, Allen, Huber, Elmer J., Lyman, John L., Clark, John H.Volume:
51
Year:
1980
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.328268
File:
PDF, 560 KB
english, 1980