Thinning of silicon-on-insulator wafers by numerically...

Review of Scientific Instruments 2004 Vol. 75; Iss. 4

Thinning of silicon-on-insulator wafers by numerically controlled plasma chemical vaporization machining

Mori, Yuzo, Yamamura, Kazuya, Sano, Yasuhisa
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Volume:
75
Year:
2004
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1687041
File:
PDF, 908 KB
english, 2004
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