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Proximity x-ray lithography of siloxane and polymer films containing benzyl chloride functional groups
Dressick, W. J., Dulcey, C. S., Brandow, S. L., Witschi, H., Neeley, P. F.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581833
File:
PDF, 820 KB
english, 1999