A closed form analytic model for separation by implantation of oxygen oxide growth using a joined-Gaussian approximation
Hosack, H. H., El-Ghor, M. K., Hollingsworth, J., Joyner, K.Volume:
73
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.353220
File:
PDF, 1.32 MB
english, 1993