Atomic force microscopy investigation of a-C:H films...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2002 Vol. 20; Iss. 2

Atomic force microscopy investigation of a-C:H films prepared by plasma enhanced chemical vapor deposition for inertial confinement fusion experiments

Dumay, B., Finot, E., Theobald, M., Legaie, O., Baclet, P., Durand, J., Goudonnet, J. P.
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Volume:
20
Year:
2002
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1446444
File:
PDF, 608 KB
english, 2002
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